Dry Etching of Magnetic Tunnel Junction Stacks in a CH 3 COOH/Ar Gas Mixture

Currently available semiconductor memory devices are primarily composed of Dynamic Random Access Memory (DRAM), Static Random Access Memory (SRAM) and flash memories, which are based on combinations of capacitors and transistors. Even though this technology in the early 1970's, successful efforts have been made to increase their storage density and decrease their prices. Nevertheless, use of these…